Çѱ¹Á¤º¸Åë½ÅÇÐȸ ³í¹®Áö (Journal of the Korea Institute of Information and Communication Engineering)
Current Result Document :
ÇѱÛÁ¦¸ñ(Korean Title) |
MEMS ¼¾¼ ±â¹Ý °íÁ¤¹Ð ±â¿ï±â ¸ð´ÏÅ͸µ ½Ã½ºÅÛ ¼³°è |
¿µ¹®Á¦¸ñ(English Title) |
Development of MEMS Sensor-based High Resolution Tilt Monitoring System |
ÀúÀÚ(Author) |
¼Õ¿µ´Þ
ÀºÃ¢¼ö
Young-Dal Son
Chang-Soo Eun
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¿ø¹®¼ö·Ïó(Citation) |
VOL 23 NO. 11 PP. 1364 ~ 1370 (2019. 11) |
Çѱ۳»¿ë (Korean Abstract) |
°ÇÃ๰À̳ª ±³·®, Åͳΰú °°Àº ±¸Á¶¹°ÀÇ ºØ±«¸¦ ÃøÁ¤Çϱâ À§ÇÏ¿© ±â¿ï±â ¼¾¼¸¦ »ç¿ëÇÏ°í ÀÖÀ¸¸ç ÃÖ±Ù¿¡´Â »ç¿ë¼ºÀÌ Æí¸®ÇÏ°í °¡°ÝÀÌ Àú·ÅÇÏ¿© MEMS(Micro-Electro-Mechanical System) ¼¾¼¸¦ »ç¿ëÇÑ ±â¿ï±â ¼¾¼¸¦ ¸¹ÀÌ »ç¿ëÇÏ°í ÀÖÀ¸³ª ÃøÁ¤ ¹üÀ§°¡ ÇÑÁ¤µÇ¾î ÀÖ¾î 360µµ Àü ¹æÀ§¿¡ ´ëÇØ °íÁ¤¹Ðµµ¸¦ °¡ÁöÁö´Â ¸øÇÏ°í ÀÖ´Ù. ÀÌ°ÍÀº MEMS ¼¾¼°¡ °®´Â ¿ÀÇÁ¼Â°ú ½ºÄÉÀÏ ¿ÀÂ÷ ¶§¹®ÀÌ´Ù. º» ³í¹®¿¡¼´Â MEMS ¼¾¼°¡ °®´Â ±â°èÀû ¿ÀÂ÷¸¦ ÁÙÀ̱â À§ÇÏ¿© Á¤¹Ðµµ°¡ ³ôÀº °¢µµ °è»êÀ» À§ÇÑ ¾Ë°í¸®ÁòÀ» Á¦½ÃÇÏ¿´°í MEMS ¼¾¼ ¸ðµâ°ú Àü¼Û ¸ðµâÀ» Á¦ÀÛÇÏ¿© ±³Á¤ Àü ¼¾¼ ¸ðµâÀÇ °¢µµ Á¤È®µµ¿Í ±³Á¤ ÈÄ °¢µµ ÃøÁ¤ Á¤È®µµ¸¦ ºñ±³ÇÏ¿© ±³Á¤ ¾Ë°í¸®ÁòÀÇ È¿°ú¸¦ Á¦½ÃÇÏ¿´À¸¸ç, ½ÇÇè °á°ú Á¦¾È ±â¼úÀ» Àû¿ëÇÏ¿´À» ¶§ 360µµ Àü ¹æÀ§¿¡ ´ëÇØ ¡¾0.015µµÀÇ Á¤¹Ðµµ¸¦ °¡ÁüÀ» È®ÀÎÇÏ¿´´Ù.
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¿µ¹®³»¿ë (English Abstract) |
Tilt sensors are mainly used to measure the collapse of structures such as buildings, bridges and tunnels. Recently, due to the ease of use and low price, many tilt sensors using MEMS sensors have been used, but the measurement angle range is limited, and thus, they do not have high precision for 360 degree. This is due to the inherent offset and scale errors of MEMS sensors. In this paper, we proposed an algorithm for the calculation of precision angles to reduce the mechanical error of MEMS sensors, and produced a MEMS sensor module and a transmission module to compare the angle accuracy of sensor modules before calibration and the angle measurement accuracy after calibration. Experimental results show that the proposed technique has a precision of ¡¾ 0.015 degrees for all 360-degree.
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Å°¿öµå(Keyword) |
MEMS ¼¾¼
°æ»ç°è
°¢µµ °è»ê
¿ø°Ý ¸ð´ÏÅ͸µ
MEMS Sensor
Inclinometer
Angle Gauge
Remote Monitoring
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