Çѱ¹Á¤º¸Åë½ÅÇÐȸ ³í¹®Áö (Journal of the Korea Institute of Information and Communication Engineering)
Current Result Document :
ÇѱÛÁ¦¸ñ(Korean Title) |
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¿µ¹®Á¦¸ñ(English Title) |
A study on the highly sensitive metal nanowire sensor for detecting hydrogen |
ÀúÀÚ(Author) |
¾ÈÈ£¸í
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Ho-Myoung An
Young-Ho Seo
Won-Jae Yang
Byungcheul Kim
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¿ø¹®¼ö·Ïó(Citation) |
VOL 18 NO. 09 PP. 2197 ~ 2202 (2014. 09) |
Çѱ۳»¿ë (Korean Abstract) |
º» ¿¬±¸¿¡¼´Â Æȶóµã (Pd) ³ª³ë¼±À¸·Î ±¸¼ºµÈ ¼¾¼ÀÇ °í°¨µµ ¼ö¼Ò°ËÁö´É·Â¿¡ ´ëÇؼ Á¶»çÇÏ¿´´Ù. Æȶóµã ³ª³ë¼±Àº ¾Ë·ç¹Ì´½ ¾ç±Ø »êȸ· (AAO : anodic aluminum oxide) ä³Î¿¡ Àü±âµµ±Ý¹ýÀ» ÀÌ¿ëÇÏ¿© ¼ºÀå½ÃÄ×À¸¸ç, ¼ö»êȳªÆ®·ý ¼ö¿ë¾×À» ÀÌ¿ëÇÏ¿© ³ª³ë¼±À» ºÐ¸®ÇÑ ÈÄ Æ÷Åä ¸®¼Ò±×·¡ÇÇ¿Í ÀüÀÚºö ¸®¼Ò±×·¡ÇÇ °øÁ¤ ¹× ¸®ÇÁÆ®¿ÀÇÁ °øÁ¤À» »ç¿ëÇÏ¿© ±Ý¼Ó³ª³ë¼± ¼ö¼Ò¼¾¼¸¦ Á¦ÀÛÇÏ¿´´Ù. 2%ÀÇ ¼ö¼Ò¿¡¼´Â 1.92% ÀÇ ¹Î°¨µµ°¡, 0.1% ÀÇ ¼ö¼Ò¿¡¼´Â 0.18% ÀÇ ¹Î°¨µµ°¡ º¯ÇÏ´Â °í°¨µµ Ư¼ºÀ» ¾ò¾úÀ¸¸ç, ÀÌ´Â Æȶóµã ³ª³ë¼±ÀÇ ÀúÇ×Àº ¼ö¼ÒÀÇ ÈíÂø°ú Å»Âø¿¡ ÀÇÁ¸Çϱ⠶§¹®ÀÌ´Ù. µû¶ó¼ »ó¿Â¿¡¼ °í°¨µµ ¼ö¼Ò °¡½º °ËÃâÀ» À§ÇÏ¿© Æȶóµã ³ª³ë¼±ÀÌ ÀÀ¿ëµÉ ¼ö ÀÖÀ» °ÍÀ¸·Î ±â´ëÇÑ´Ù.
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¿µ¹®³»¿ë (English Abstract) |
In this paper, we report on an investigation of highly sensitive sensing performance of a hydrogen sensor composed of palladium (Pd) nanowires. The Pd nanowires have been grown by electrodeposition into nanochannels and liberated from the anodic aluminum oxide (AAO) template by dissolving in an aqueous solution of NaOH. A combination of photo-lithography, electron beam lithography and a lift-off process has been utilized to fabricate the sensor using the Pd nanowire. The hydrogen concentrations for 2% and 0.1% were obtained from the sensitivities (¥ÄR/R) for 1.92% and 0.18%, respectively. The resistance of the Pd nanowires depends on absorption and desorption of hydrogen. Therefore, we expect that the Pd nanowires can be applicable for detecting highly sensitive hydrogen gas at room temperature.
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Å°¿öµå(Keyword) |
³ª³ë¼±
¼ö¼Ò¼¾¼
°í°¨µµ
Æȶóµã
Àü±âµµ±Ý¹ý
anowire
Hydrogen sensor
Highly sensitive
Palladium
Electrodeposition
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