JICCE (한국정보통신학회)
Current Result Document :
| 한글제목(Korean Title) |
Influence of the Precursor Solutions on the Properties of BST Thin Films |
| 영문제목(English Title) |
Influence of the Precursor Solutions on the Properties of BST Thin Films |
| 저자(Author) |
Seong-Jun Kang
Yang-Hee Joung
|
| 원문수록처(Citation) |
VOL 01 NO. 02 PP. 0070 ~ 0073 (2003. 06) |
한글내용
(Korean Abstract) |
|
영문내용
(English Abstract) |
We have studied the effects of solvents and additives in the precursor solutions on the characteristics of barium strontium titanate (BST) thin films. The solution having two solvents, ie. acetic acid for barium acetate and strontium acetate and 2-methoxyethanol for titanium isopropoxide and also having an additive of ethylene glycol shows good stability and remains homogeneous even after a month of ageing. It produces excellent BST thin film without cracks. Dielectric constant, loss tangent at 10KHz and leakage current density at 3V of the BST (70/30) thin film made from this solution are 339, 0.052 and 13.3㎂/㎠, respectively. |
| 키워드(Keyword) |
sol-gel
BST thin film
dielectric constant
leakage current
|
| 파일첨부 |
PDF 다운로드
|
