Efficient Thermal Annealing for FBAR Devices

홈 > 연구문헌 > 영문 논문지 > JICCE (한국정보통신학회)

한글제목(Korean Title)	Efficient Thermal Annealing for FBAR Devices
영문제목(English Title)	Efficient Thermal Annealing for FBAR Devices
저자(Author)	Hae-il Song Linh Mai Giwan Yoon
원문수록처(Citation)	VOL 03 NO. 04 PP. 0167 ~ 0171 (2005. 12)
한글내용 (Korean Abstract)
영문내용 (English Abstract)	In this paper, the resonance characteristics of SMR-type FBAR device annealed by three different annealing methods are investigated and compared. The resonance characteristics could be effectively improved by the proposed efficient annealing conditions. It seems very useful for improving the performance of the SMR-type FBAR devices as a cost-effective way.
키워드(Keyword)	Film bulk acoustic resonator (FBAR) Solidly mounted resonator (SMR) Bragg reflector Thermal annealing Return Loss (S₁₁) Q-factor
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